Certified & Remanufactured
Metrology
ASET-F5x Pro
Film Metrology System
The ASET-F5x Pro film metrology system provides reliable, affordable and high precision thin film measurements of film thickness, refractive index, and bow/stress capability across a broad range of film stacks and geometries. The system features capabilities that provide absolute accuracy, reproducibility and system-to-system matching required for fabs that manufacture devices for the IoT, automotive and mobile markets. The ASET-F5x Pro integrates precise optical spectroscopic ellipsometry and reflectometry metrology technologies in a single system to manage the full range of thin film measurement challenges required by ?LED, MEMs and IC manufactures.
Applications
On-product film thickness and stoichiometry control, Inline tool and process monitoring for lithography, deposition, CMP and etch, Process tool matching.
Archer?
Overlay Metrology Systems
The Archer? imaging-based overlay metrology system provides robust, accurate, reliable, and reproducible overlay registration and CD measurements on various wafer types, sizes, materials and thicknesses. The industry proven Archer platform provides fast, repeatable and the system-to-system matched performance required by fabs producing products for the IoT, automotive, ?LED and mobile segments.
51ÁÔÆæ has a comprehensive portfolio of metrology systems for advanced chip manufacturing, including additional Archer? overlay systems, ATL? overlay systems, and SpectraFilm? and Aleris? films metrology systems.
Certified & Remanufactured